Solution for High-Precision Temperature and Humidity Control System
I. Core Definitions and Precision Grading
A high-precision temperature and humidity control system is characterized by decoupled and independent control of temperature and humidity, extremely low fluctuations, high uniformity, and strong anti-interference capabilities. It differs from ordinary precision air conditioners (±1℃/±5% RH) and is classified into three levels based on precision:
• Standard High Precision: ±0.1℃ / ±2%RH, uniformity ≤ ±0.3℃/±3% RH, suitable for precision electronics, metrology, and general laboratories
• Ultra-High Precision: ±0.05℃ / ±1%RH, uniformity ≤ ±0.1℃/±1.5% RH, suitable for semiconductor front-end, optical inspection, and biopharmaceutical cleanrooms
• Extreme Precision: ±0.01℃ / ±0.2%RH, uniformity ≤ ±0.05℃/±0.5% RH, suitable for lithography, nanometer measurement, and quantum laboratories
II. Mainstream System Solution Selection (by Scenario)
Solution 1: MAU + DCC + FFU (Clean + Ultra-High Precision, Class 100/1000 Cleanroom)
• Applicable: Semiconductor lithography, wafer manufacturing, precision optics, and sterile areas in biopharmaceuticals
• Core: MAU processes fresh air (dehumidification + temperature regulation) → DCC dry coil eliminates indoor sensible heat → FFU recirculates air + high-efficiency filtration
• Precision: ±0.05~±0.01℃ / ±0.5~±1%RH, dry operation, no condensation water, cleanliness ISO 4–5
Solution 2: Direct Expansion High-Precision Temperature and Humidity Unit (Small Spaces, Laboratories, Inspection Rooms)
• Applicable: Metrology rooms, material inspection, precision instrument rooms, small R&D spaces (≤100㎡)
• Core: Integrated variable-frequency direct expansion + precise heating + rotor/electrode humidification + independent temperature and humidity closed loop
• Precision: ±0.1~±0.05℃ / ±1~±2%RH, easy installation, small footprint, fast response
Solution 3: Modular AHU + Terminal Precision Air Conditioning (Large Areas, Conventional High Precision)
• Applicable: Electronic workshops, precision machining, pharmaceutical pilot plants, data center support
• Core: Centralized AHU pre-treatment + zoned terminal precision air conditioning, balancing scale and precision
• Precision: ±0.2~±0.1℃ / ±2~±3%RH, high cost-effectiveness, easy expansion
IV. Key Design Parameters and Acceptance Criteria
• Temperature Setting: 22±0.1℃~25±0.01℃ (commonly 23℃/24.5℃)
• Humidity Setting: 45%~60% RH (±1%~±2%), low humidity ≤ 40% RH, high humidity ≥ 60% RH
• Fluctuation: Continuous 24 hours in steady state, temperature ≤ ±0.05℃, humidity ≤ ±1% RH
• Uniformity: Temperature difference between any two points in the working area ≤ ±0.1℃, humidity difference ≤ ±1% RH
• Response Time: Recovery to steady state after disturbance ≤ 15s
• Filtration: ISO 5–8 clean, equipped with medium and high-efficiency filters + HEPA/ULPA
V. Typical Application Scenarios
1. Semiconductor/Chip: Lithography, etching, thin film, inspection, requiring ±0.01~±0.05℃ / ±0.5~±1% RH, anti-micro-vibration, zero condensation
2. Precision Optics/Laser: Lenses, mirrors, optical fibers, laser equipment, where temperature and humidity fluctuations directly affect wavelength and precision
3. Metrology/Inspection: Length, mass, electrical metrology laboratories, ensuring stability of instruments and measurement standards
4. Biopharmaceuticals: Sterile rooms, cell culture, vaccine production, coordinated control of temperature, humidity, cleanliness, and sterility
5. Aerospace/Military: Precision parts processing, material aging, environmental simulation tests
